Inorganic Nano/Micropattern Fabrication Method Using Nanoimprint Lithography and Physical Rubbing
نویسندگان
چکیده
منابع مشابه
Nanoimprint lithography for nanodevice fabrication
Nanoimprint lithography (NIL) is a compelling technique for low cost nanoscale device fabrication. The precise and repeatable replication of nanoscale patterns from a single high resolution patterning step makes the NIL technique much more versatile than other expensive techniques such as e-beam or even helium ion beam lithography. Furthermore, the use of mechanical deformation during the NIL p...
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Polymeric nanoparticles are becoming increasingly important in a variety of biological applications, such as biomolecular sensing, diagnostic imaging, and therapeutic drug delivery. For these applications, the mass production of multifunctional nanocomposite materials with precise control of particle size, shape, and composition is a significant challenge. For instance, the use of conventional ...
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In order to keep up with the advances in nano-fabrication, alternative, cost-efficient lithography techniques need to be implemented. Two of the most promising are nanoimprint lithography (NIL) and stencil lithography. We explore here the possibility of fabricating the stamp using stencil lithography, which has the potential for a cost reduction in some fabrication facilities. We show that the ...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2017
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.30.527